AMAT 0010-28715 300mm HTR MCA SST Heater Purge Ring
The AMAT 0010-28715 is a heater purge ring for AMAT platforms. High-Temperature Tolerance: Capable of withstanding temperatures up to 300°C, accommodating various semiconductor manufacturing processes. | Uniform Heating: Designed to provide even temperature distribution across the heater surface, preventing process defects caused by temperature inconsistencies. | Long Lifespan: Made from high-temperature resistant materials, offering extended service life and reducing maintenance costs.. Factory-sealed, live-rack tested, 48-hour burn-in. 12-month warranty. Ships within 24h.
Technical Specifications
| AMAT 0010-28715 | is a high-performance heater produced by Applied Materials, primarily used for temperature control in Electrostatic Chuck (ESC) systems during semiconductor manufacturing. |
|---|---|
| Precise Temperature Control | Allows accurate temperature regulation of the ESC within a set range, ensuring stability and reliability in the semiconductor manufacturing process. |
| High-Temperature Tolerance | Capable of withstanding temperatures up to 300°C, accommodating various semiconductor manufacturing processes. |
| Uniform Heating | Designed to provide even temperature distribution across the heater surface, preventing process defects caused by temperature inconsistencies. |
| Long Lifespan | Made from high-temperature resistant materials, offering extended service life and reducing maintenance costs. |
| Broad Compatibility | Compatible with various models of Applied Materials' Electrostatic Chucks. |
| Wafer Processing | Controls the temperature of the Electrostatic Chuck during etching, deposition, and lithography processes, ensuring process stability and product quality. |
| Research and Development | Provides precise temperature control environments for semiconductor material and device development. |
| High-Volume Production | Maintains process consistency and improves production efficiency in high-yield semiconductor manufacturing facilities. |
| Manufacturer | AMAT |
| Model / SKU | 0010-28715 |
Ships within 24 hours | 12-Month Warranty | Worldwide Delivery
Genuine AMAT — Tested
Live-rack test, channel verification, 48h burn-in at 55C. Printed test report. 12-month warranty. Ships within 24h.
Compatible Parts — Same System
These modules share the same system family as the 0010-28715. Commonly ordered together for complete rack builds or spare parts kits.
Related Products
